4

Simulation of Fogging Electrons in Electron Beam Lithography

Year:
2009
Language:
english
File:
PDF, 388 KB
english, 2009
7

Monte Carlo simulation of 1–10-keV electron scattering in an aluminum target

Year:
1981
Language:
english
File:
PDF, 630 KB
english, 1981
18

Monte Carlo simulation of 1–10-KeV electron scattering in a gold target

Year:
1981
Language:
english
File:
PDF, 711 KB
english, 1981
33

Computer simulation of light emission by high-energy electrons in YAG single crystals

Year:
1994
Language:
english
File:
PDF, 541 KB
english, 1994
37

Mask Charging Phenomena during Electron Beam Exposure in the EPL System

Year:
2004
Language:
english
File:
PDF, 247 KB
english, 2004